Vacuum Eutectic Furnace for IGBT Mems Semicondutor Vacuum Packaging

• After-sales Service: 1 Year
• Condition: New
• Certification: ISO, CE
• Warranty: 12 Months
• Automatic Grade: Automatic
• Installation: Vertical
• Model NO.: H5
• Furnace Height: 70mm
• Temperature Range: up to 450 Degree
• Heating Layer Size: 500*300*70mm*5
• Gas: Formic Acid, Nitrogen, Hydrogen or Mixer
• Layder Weight Capacity: 20kg
• Vacuum Degree: 0.1mbar/0.0001mbar
• Max Temperature Rising Speed: >=70c/Min
• Max Cooling Rate: >=120c/Min
• Rated Power: 70kw
• Real Power: 55kw
• Voltage: 380V 50-60A
• Transport Package: Plywood with Vacuum Package
• Specification: 165*120*190cm
• Trademark: TORCH
• Origin: China
• Production Capacity: 10 PCS/Month

Product Description

Torch Vacuum Reflow Oven for Semiconductor packaging H5/H6

Application Fields: IGBT module, MEMS packaging, high power

electronics packaging, photoelectric device packaging, hermetic

packaging etc.

Features:

1,high vacuum degree: 0.01 mbar high vacuum, vacuum degree of cavity

numerical real-time display, and can control and adjust ;

2, vacuum pumping speed: 50 /60/90m³/h

3, process cavity pressure: 0.1 /0.0001mbar

4, bearing of the heating plate layer insulation: single bearing ≥20

kilograms

5, fast cooling speed: set up independent water and gas cooling equipment in

the cavity, cause the welding device for rapid cooling.

6, welding quality of low void rate ensure that after welding, large welding

plate implementation avhive hole rate under 3% .

7, meet the jinxi welding, high lead solder, lead-free materials such as

high temperature welding requirements and technical requirements of

high quality welding solder paste in the vacuum environment.

8, high capacity:each layer of the actual welding area is 500 * 300 mm,

multilayer work at the same time, achieving the mass production of device .Equipment Introduction:

Equipment Introduction::
1.viewing system: cavity has the visible window, can observe welding

process at any time.

2.heating system: the equipment configure 5/6 set heating system, at the

same time it is working in a vacuum.

3.vacuum system: The equipment configurates the large vacuum pump,

can quick achieve the vacuum environment of high temperature 0.1mbar, mbar

0.01mbar.

4. cooling system: The equipment adopts water cooling system,to make

sure can fast cooling at the high temperature and vacuum environment

5. the software system: heating and cooling programmable control,

heating and cooling curve can be set according to craft, each curve can be

automatically generated,can be editted, modified, and storaged.

6. the control system: a modular software design can set process curve,

vacuum extraction, the atmosphere, cooling, etc independently, and the

combined production process achieve the one key operation.

7. the atmosphere system: Free soldering flux can be achieved.And the

machine can be filled with H2, N2 / H2 gas mixture, HCOOH, N2 or protective

gas reduction, etc., ensure there is no empty spot.

8, the data recording system: real-time monitoring and data recording

system, software curve recording function,temperature curve saving function,

process parameters saving function, device parameters recording and calling

function.

9, the protection system: eight system security status monitoring and

security designing (weldments overtemperature protection, machine

temperature safety protection, air pressure alarm protection, pressure protection,

safe operation protection, welding cooling water protection, level of protection,

power protection).
Technical Parameter :

Model	H5	H6
Soldering size	500*300*70mm*5 layers	500*300*70mm*6 layers
Single layer weight bearing	20KG
MAX temperature	350ºC - 450ºC
Control system	Temperature control system+ Vacuum system + Cooling system + Atmosphere system +Software control system
Temperature curve	Can store several 40 segment temperature curve
Rated power	70KW	80KW
Vacuum degree	0.01mbar/0.0001 mbar
Max heating temperature	80ºC/min
Max cooling temperature	150ºC/min
Atmosphere reduction	Power source
Power source	380V 50-60A
Temperature uniformity	±1%
Dimension	1600*1000*1800mm